Name: Helium ion Microscopy (Nanoscience and Technology) (en Inglés)
Price: 953344.00 COP
Availability: InStock
ISBN: 9783319824734

portada Helium ion Microscopy (Nanoscience and Technology) (en Inglés)

Formato

Libro Físico

Editorial

Springer

Año

2018

Idioma

Inglés

N° páginas

526

Encuadernación

Tapa Blanda

ISBN13

9783319824734

Categorías

Fïsica de la materia condensada

Helium ion Microscopy (Nanoscience and Technology) (en Inglés)

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Origen: Estados Unidos (Costos de importación incluídos en el precio)

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Reseña del libro "Helium ion Microscopy (Nanoscience and Technology) (en Inglés)"

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.